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AMAT Applied Materials Heater 300mm ESC 0010-24456 Endura2 is a device component manufactured by Applied Materials (AMAT) for semiconductor manufacturing. Here is a detailed description of it:
Product overview
Type: PVD MCA ESC Heater (physical vapor deposition multi-chamber system electrostatic chuck heater), mainly used in the semiconductor manufacturing process to heat 300mm wafers to meet specific process requirements.
Brand and Model: The brand name is Applied Materials, "0010-24456" in the model number is the part number of the heater, and "Endura2" may indicate the equipment family or version to which it belongs, often related to a specific equipment configuration and process capability.
Product characteristics
Size specification: Suitable for 300mm wafers, which is currently the mainstream wafer size in semiconductor manufacturing, and can be compatible with other 300mm process semiconductor devices, ensuring consistency and efficiency throughout the manufacturing process.
Heating uniformity: With good heating uniformity, the wafer surface can obtain a uniform temperature distribution during the heating process, which helps to improve the consistency and repeatability of the semiconductor process, and reduce the process deviation and product defects caused by uneven temperature.
Temperature control accuracy: can achieve high precision temperature control, according to different semiconductor process needs, accurately adjust and maintain the required temperature, usually can reach ±1℃ or even higher control accuracy, to meet the strict requirements of various complex processes on temperature.
Materials and durability: Made of high-quality materials with good high temperature resistance and chemical stability, it can operate stably in harsh semiconductor manufacturing environments for a long time, reduce the frequency of equipment maintenance and replacement, and improve production efficiency.
Application field
Semiconductor manufacturing process: Widely used in a variety of semiconductor manufacturing processes, such as physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, annealing, etc. In these processes, heaters play a key role in the manufacturing quality and performance of semiconductor devices by precisely controlling wafer temperature, facilitating chemical reactions, film deposition, material etching and other processes.
Integrated circuit manufacturing: In the integrated circuit manufacturing process, it is used to heat the wafer to achieve the temperature requirements in the process steps such as lithography, diffusion, and ion implantation, which helps to form accurate circuit patterns and device structures, and improve the integration and performance of the integrated circuit.
AMAT 0010-24456 MCA E-Chuck Heater
AMAT 0010-24456 MCA E-Chuck Heater
AMAT 0010-24456 MCA E-Chuck Heater
AMAT 0010-24456 MCA E-Chuck Heater
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