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ZYGO MARK GPI-XPS 6500-0203-01 Interferometer Interface Controller.
Key Features & Capabilities
Core Functionality
Interfaces between ZYGO interferometers (e.g., Mark III, Mark IIxp) and host computers
Provides nanometer-resolution position feedback for motion control systems
Supports dynamic measurements (velocity/acceleration) up to 2 m/s
Technical Parameters
Measurement Resolution: <1 nm (with environmental compensation)
Update Rate: Up to 20 kHz for high-speed applications
Channel Capacity: Typically 1-2 axes (expandable via daisy-chaining)
Signal Processing
I/O & Connectivity
Analog Outputs: ±10V for servo control loops
Digital Interfaces: RS-232/422, optional Ethernet
Trigger Inputs: Synchronization with external systems
Compatibility
Designed for ZYGO HeNe laser interferometers (632.8 nm wavelength)
Works with linear, angular, and straightness optics
Applications
Semiconductor Equipment: Lithography stage metrology
Precision Manufacturing: CNC machine tool calibration
Research Facilities: Nanotechnology positioning systems
Aerospace: Large-scale component alignment